March 14, 2023
Variation of sidewall passivation on sub-μm selectively grown Ge-on-Si single photon avalanche detectors
Coughlan C, Mirza MMA, Kirdoda J, Dumas D, Smith C, McCarthy C, Mowbray H, Watson S, Millar R, Paul DJ. “Variation of sidewall passivation on sub-μm selectively grown Ge-on-Si single photon avalanche detectors”, Proc. SPIE 12417, Optical Components and Materials XX, 124170M, 2023. DOI: 10.1117/12.2665493
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